2023 Joint Conference of the European Frequency and Time Forum and IEEE International Frequency Control Symposium (EFTF/IFCS) 2023
DOI: 10.1109/eftf/ifcs57587.2023.10272103
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MEMS-Silicon Chip Bonding Verification using GHz Pulse-echo Simulation and Measurements

Shyam Trivedi,
Yi Xuan Yeo,
Mantalena Sarafianou
et al.
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