2018
DOI: 10.11591/ijece.v8i6.pp4772-4780
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Metal-embedded SU-8 Slab Techniques for Low-resistance Micromachined Inductors

Abstract: This work presents a new fabrication technique for micro power inductors by using metal-embedded SU-8 slab molding techniques. The proposed technique uses X-ray lithography to fabricate high-aspect-ratio LIGA-like microstructures in form of embedded structures in the SU-8 slab. This process was applied to fabricate an inductor’s windings with an aspect ratio of 10, which can provide very low resistance but still preserve a small form factor and low profile. Inductors were designed as pot-core structures with o… Show more

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