“…Among various MO x used for the fabrication of pH sensors, RuO 2 and IrO 2 allow pH measurements over wide ranges, with fast responses, high accuracy and high durability. 32 However, for exible and wearable pH sensors, the application of these oxides, especially RuO 2 , is limited due to the lack of biocompatibility, exibility, high cost and high temperature processing required. 32,188,191 The sensitivity of MO x based pH sensors largely depends on the material composition and the method used for material deposition because the microstructure, porosity, surface homogeneity and crystalline structure of the material inuences the sensing performance (Table 3).…”