Methods for Fabrication of Released Nickel Comb-Drive Devices on CMOS

<title>Comb drives: versatile microstructures for capacitive sensing and electrostatic actuation</title>

“…Resonance frequencies ranging from 4.6-5.2 kHz were reported in [Hirano92]. Nickel plate combdrives with Q-factors as high as 500 were reported in [Yalcinkaya01]. Comb-drive resonators as diagnostic elements for process variations were described in [Allen01].…”