Methods of Coherent X-Ray Diffraction Imaging

Prosekov, P. A.; Nosik, V. L.; Благов, А. Е.

doi:10.1134/s1063774521060286

“…The main element of lithography based on a synchrotron storage ring is a source of coherent synchrotron radiation (undulator), which generates this radiation by creating a periodic magnetic field in a system of permanent magnets and then directs it to the mask [22][23][24]. As shown in Fig.…”

Section: Diffraction Theory Of Image Formation In Projection X-ray Op...mentioning

confidence: 99%

“…1 P  and 1 P  . The areas of geometric optics and Fraunhofer diffraction are distinguished because in these areas it is possible to obtain simpler formulas than the Fresnel integral (22).…”

Section: Fresnel Diffractionmentioning

confidence: 99%

Refractive X-ray optics: towards wavelengths of 13.5 nm and beyond

Demin,

Korneev,

Glagolev

et al. 2023

Preprint

0

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In this work we analyze the possibility of using refractive lenses for X-ray lithography in the wavelength range λ=2-20 nm, where the absorption of radiation in the lens material has a significant impact on the image quality. The general scheme of image formation in projection refractive X-ray optics using a composite objective lens consisting of biconcave elementary lenses is considered. By means of the analytical solution and finite-element simulation model, possible ways to obtain the lens transmission function taking into account the absorption of X-rays were investigated. A lens based on a beryllium (Be) thin film with a complex refractive index n=0.989+0.0015i was chosen to estimate its optical properties at a wavelength of 13.5 nm. Two mechanisms of blurring of the X-ray beam at the lens focus were studied: a mechanism associated with X-ray diffraction and a mechanism based on the absorption of X-ray radiation in the lens material. The possibility of reducing X-ray absorption by switching to diffractive and kinoform lenses is being explored. A method for constructing an image in a diffraction lens with a 4-fold reduction taking into account X-ray absorption is presented. It was shown that to obtain image resolution in the range of 20-40 nm, composite kinoform lenses consisting of a small number (N=3-6) of elementary lenses can be used.

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“…The main element of lithography based on a synchrotron storage ring is a source of coherent synchrotron radiation (undulator), which generates this radiation by creating a periodic magnetic field in a system of permanent magnets and then directs it to the mask [22][23][24]. As shown in Fig.…”

Section: Diffraction Theory Of Image Formation In Projection X-ray Op...mentioning

confidence: 99%

“…1 P  and 1 P  . The areas of geometric optics and Fraunhofer diffraction are distinguished because in these areas it is possible to obtain simpler formulas than the Fresnel integral (22).…”

Section: Fresnel Diffractionmentioning

confidence: 99%

Refractive X-ray optics: towards wavelengths of 13.5 nm and beyond

Demin,

Korneev,

Glagolev

et al. 2023

Preprint

0

View full text Add to dashboard Cite

In this work we analyze the possibility of using refractive lenses for X-ray lithography in the wavelength range λ=2-20 nm, where the absorption of radiation in the lens material has a significant impact on the image quality. The general scheme of image formation in projection refractive X-ray optics using a composite objective lens consisting of biconcave elementary lenses is considered. By means of the analytical solution and finite-element simulation model, possible ways to obtain the lens transmission function taking into account the absorption of X-rays were investigated. A lens based on a beryllium (Be) thin film with a complex refractive index n=0.989+0.0015i was chosen to estimate its optical properties at a wavelength of 13.5 nm. Two mechanisms of blurring of the X-ray beam at the lens focus were studied: a mechanism associated with X-ray diffraction and a mechanism based on the absorption of X-ray radiation in the lens material. The possibility of reducing X-ray absorption by switching to diffractive and kinoform lenses is being explored. A method for constructing an image in a diffraction lens with a 4-fold reduction taking into account X-ray absorption is presented. It was shown that to obtain image resolution in the range of 20-40 nm, composite kinoform lenses consisting of a small number (N=3-6) of elementary lenses can be used.

show abstract

“…As a classical transmission imaging technique, coherent diffraction imaging (CDI) is a powerful lensless imaging method that provides the ability to reconstruct the distribution of the complex object from the recorded intensity [1][2][3]. In particular, the G-S (Gerchberg-Saxton) [4], HIO (Hybrid input and output) [5] and ER (Error-reduction) [6] algorithms are the three classical algorithms in CDI, which are distinguished by the simplicity of the imaging system and the convenience of implementation, where theoretically the diffraction limited resolution can be achieved [7].…”

Section: Introductionmentioning

confidence: 99%