“…[13,15,19,26]. However, these methods are all unable to provide information on the chemical composition of the thin films, which is why spectroscopic methods, like IR, Raman, X-ray diffraction (XRD), X-ray photoelectron spectroscopy (XPS), or ion beam spectroscopy like elastic recoil detection analysis (ERDA), Rutherford backscattering (RBS) or proton-induced X-ray emission (PIXE), were also used later [2,13,15,16,19,[27][28][29].…”