Michelson Interferometer with mirrored right-angled prism for measurement of tilt with double sensitivity

Mandal, Laxman; Singh, Jaspal; Ganesan, A. R.

doi:10.1007/s12596-023-01327-2

Cited by 2 publications

(3 citation statements)

References 9 publications

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“… Autocollimator with expandability: ( a ) a laser-fiber autocollimation method can greatly reduce the laser beam drift [ 64 ]; ( b ) sensitivity improvement method [ 65 ]. PMF: polarization-maintaining fiber.…”

Section: Figurementioning

confidence: 99%

“…In order to improve sensitivity, a Michelson interferometer has been developed, which uses a right-angled prism mirrored on the sides containing the right angle, to measure small tilt angles with double sensitivity compared to the classical Michelson interferometer. With this setup, it could measure tilt angles up to 1 µrad [65]. Time is in minutes.…”

Section: (A) the Location Of The Light Spotmentioning

confidence: 99%

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A Review: High-Precision Angle Measurement Technologies

Wang,

Ma,

Cao

et al. 2024

Sensors

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Angle measurement is an essential component of precision measurement and serves as a crucial prerequisite for high-end manufacturing. It guides the implementation of precision manufacturing and assembly. The current angle measurement methods mainly focus on multiple axes, high precision, and large measurement ranges. This article introduces the technology of angle measurement from the perspectives of single-axis and multi-axis measurement schemes. Firstly, the single-axis measurement scheme is primarily achieved through optical methods, such as encoder discs that measure energy changes and interferometric phase changes, as well as mechanical, electromagnetic, and inertial angle measurement methods, among which interferometric methods offer the highest accuracy, with high cost, and encoder discs provide the largest measurement range with an ordinary price. Secondly, in the multi-axis measurement scheme, autocollimation instruments, including plane mirrors, gratings, and self-designed targets, are the main options. Although grating encoders can achieve three degrees of freedom in angle measurement with an ordinary price, they are limited in terms of measurement range and sensitivity compared to self-designed targets. Lastly, artificial intelligence assistance precision measurement is increasingly being embraced due to significant advancements in computer performance, making it more convenient to identify the relationship between measured values and detection values. In conclusion, angle measurement plays a crucial role in precision manufacturing, and the evolving and improving technologies provide the manufacturing industry with greater choices. The purpose of this review is to help readers quickly find more suitable technical solutions according to current application requirements, such as single/multiple axes, accuracy level, measuring range, budget, etc.

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Section: Figurementioning

confidence: 99%

Section: (A) the Location Of The Light Spotmentioning

confidence: 99%

A Review: High-Precision Angle Measurement Technologies

Wang,

Ma,

Cao

et al. 2024

Sensors

View full text Add to dashboard Cite

show abstract

“…Axis measurement is an essential method for determining relative position and attitude [ 1 , 2 ], and it is widely used in industrial production, military operations, aerospace, and other fields. It is also employed in scientific research, including in straightness calibration [ 3 ], photon energy detection [ 4 ], and surface measurement [ 5 ]. In the aspect of axis angle measurement, it can be divided into mechanical methods, electromagnetic methods, optical methods, and inertial methods [ 6 ].…”

Section: Introductionmentioning

confidence: 99%

An Autocollimator Axial Measurement Method Based on the Strapdown Inertial Navigation System

Ma,

Li,

Liu

et al. 2024

Sensors

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Autocollimators are widely used optical axis-measuring tools, but their measurement errors increase significantly when measuring under non-leveled conditions and they have a limited measurement range due to the limitations of the measurement principle. To realize axis measurement under non-leveled conditions, this paper proposes an autocollimator axis measurement method based on the strapdown inertial navigation system (SINS). First, the measurement model of the system was established. This model applies the SINS to measure the change in attitude of the autocollimator. The autocollimator was then applied to measure the angular relationship between the measured axis and its own axis, based on which the angular relationship of the axis was measured via computation through signal processing and data fusion in a multi-sensor system. After analyzing the measurement errors of the system model, the Monte Carlo method was applied to carry out a simulation analysis. This showed that the majority of the measurement errors were within ±0.002° and the overall measurement accuracy was within ±0.006°. Tests using equipment with the same parameters as those used in the simulation analysis showed that the majority of the measurement errors were within ±0.004° and the overall error was within ±0.006°, which is consistent with the simulation results. This analysis proves that this method solves the problem of the autocollimator being unable to measure the axis under non-leveled conditions and meets the needs of axis measurement with the application of autocollimators under a moving base.

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Michelson Interferometer with mirrored right-angled prism for measurement of tilt with double sensitivity

Cited by 2 publications

References 9 publications

A Review: High-Precision Angle Measurement Technologies

A Review: High-Precision Angle Measurement Technologies

An Autocollimator Axial Measurement Method Based on the Strapdown Inertial Navigation System

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