“…Accelerometers, optical switches /micro-mirrors, and inkjet printer heads are the most prominent commercially available MEMS devices. Combination of MEMS, integrated circuits, and active materials (e.g., piezoelectric, magnetostrictive, and shape memory alloys) has resulted in the development of smart wireless systems suitable for health monitoring functions (Malas et al 2003). For example, a microcomb-type transducer was used to generate ultrasonic waves for monitoring cracks from rivet holes (Varadan and Varadan 2000).…”