2008
DOI: 10.1007/978-0-387-68351-5_13
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Cited by 4 publications
(5 citation statements)
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“…The substrate beneath the crystal is removed to allow large out-of-plane oscillations and to allow the transmission of X-rays. The excitation is provided by in-plane comb-drive actuators, which are inter-digitated capacitors that provide torque with high force density 1 21 (see Supplementary Data 1 and Supplementary Fig. 1 ).…”
Section: Resultsmentioning
confidence: 99%
See 1 more Smart Citation
“…The substrate beneath the crystal is removed to allow large out-of-plane oscillations and to allow the transmission of X-rays. The excitation is provided by in-plane comb-drive actuators, which are inter-digitated capacitors that provide torque with high force density 1 21 (see Supplementary Data 1 and Supplementary Fig. 1 ).…”
Section: Resultsmentioning
confidence: 99%
“…Devices based on microelectromechanical systems (MEMS) when combined with micro-optics have found a wide range of photonics applications. These include high-resolution imaging and displays 1 , biomedical diagnostics and bioimaging 2 3 , and optical communications 4 5 , all of which rely on the ability of the device to control the temporal and spectral shape of light pulses. Most MEMS use silicon as the structural material that act as mirrors, gratings and lenses to perform device functions such as microfocusing, high-speed modulation, beam-splitting, spectral filtering, wavelength dispersion, waveguiding and scanning.…”
mentioning
confidence: 99%
“…Interdigitated HB probes have been used to map elastic moduli of polymer materials in air and in liquid . Compared to torsional probes, interdigitated probes are less constrained in terms of mechanical design and are about 1 order of magnitude more sensitive optically . Here, we extended this approach to demonstrate a new capability for imaging cytoskeletal organization in fixed and live cells.…”
mentioning
confidence: 99%
“…A reflective-mode metalens has been successfully integrated onto a high-speed MEMS scanner through the collaboration between Capasso’s group at Harvard University and Lopez’s group at the Argonne National Lab [47] for lateral beam scanning. Actuated by staggered comb-drives, the 2D MEMS scanner offers fast speed beam steering, high-resolution imaging, and high optical efficiency [48]. The fabricated metasurface lens was on a square substrate with side 0.8 mm and has a focal length of 5 mm with incident light 45° away from the surface, shown in Figure 8a.…”
Section: Advanced Techniques For Metasurface-based Lensesmentioning
confidence: 99%