2012
DOI: 10.5772/1363
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Microelectromechanical Systems and Devices

Abstract: Chapter MEMS Microfluidics for Lab-on-a-Chip Applications 39 Nazmul Islam and Saief Sayed Chapter Acoustic Wave Based MEMS Devices, Development and Applications 65 Ioana Voiculescu and Anis N. Nordin Part MEMS Characterization and Micromachining 87 Chapter MEMS Characterization Based on Optical Measuring Methods 89 Tong Guo, Long Ma and Yan Bian Chapter Surface Characterization and Interfacial Adhesion in MEMS Devices 109 Y. F. Peng and Y. B. Guo Chapter Advanced Surfactant-Modified Wet Anisotropic Etching 131… Show more

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Cited by 10 publications
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References 110 publications
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