Micromachined III-V multimorph actuators for MOEMS applications - concept, design, and model

Ongkodjojo, Andojo; Tay, Francis Eng Hock; Ramam, A.

doi:10.1109/jmems.2005.844779

Cited by 8 publications

(18 citation statements)

References 27 publications

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“…In the design process, the optimization problem is formulated as an objective function to find the design variables and the global solution, while satisfying the multidisciplinary design constraints. More details on the optimization method for the single objective function have been reported in [1][2][3].…”

Section: Single-objective Optimizationmentioning

confidence: 99%

“…Table 2 presents a summary of the specified constraints in this paper. More details on the constraints has been reported in [2], [3].…”

Section: Constraintsmentioning

confidence: 99%

“…3) The critical length (l cr −l ) depends on the applied force (F z ), which is 50 µN and a factor (n*a) ≥ 3.24 × 10 6 (from the design structure B), where a is an acceleration (m/s 2 ), and n is n times its own weight. 4) The natural frequency (ω z ) value is 3.2327 × 10 6 rad/s, which violates the resonant frequency constraint.…”

Section: Comparisons Among the Proposed Design Structuresmentioning

confidence: 99%

“…(10), and Eq. (1) from [2], [3]. They can be also used to model the piezoelectric heterogeneous bimorph (a 2-layer structure) as reported in [12], [17].…”

Section: Comparisons Among the Proposed Design Structuresmentioning

confidence: 99%

“…Some efforts utilizing different optimization algorithms (such as Simulated Annealing algorithm for single objective function and multiple objective functions [1][2][3][4], and multiobjective evolutionary algorithm including Genetic algorithms with Pareto approach [5], [6]) have been developed for MEMS design and applications. There have been many researches on the global optimization techniques including GA and SA in the field of numerical optimization as reported in literature.…”

Section: Introductionmentioning

confidence: 99%

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Techniques in Global Optimal Design for MEMS & Their Applications

Ongkodjojo

Tay

Mems/Nems

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This chapter presents an overview on techniques in global optimal design for MEMS & their applications. We address single-objective and multi-objective functions optimizations using a Simulated Annealing (SA) method, which has been used by us to handle some constraints as well. This optimization method is essentially an iterative random search procedure with adaptive moves along the coordinate directions. It permits downhill or uphill moves under the control of a probabilistic criterion using Metropolis criterion. Thus, it tends to avoid the first local maxima or minima encountered. The SA method is usually used for a single objective optimization. However, the use of the SA for multi-objective functions is also described in this chapter. Besides, the evolutionary algorithms, which are widely used for multi-objective problems, are briefly presented. For design applications, our device example is a multimorph. The SA exhibits a promising superiority over other algorithms using the gradient methods, have a greater search flexibility and efficiency in exploring the neighborhood of the solutions on the constraints boundaries to find the global optimum solutions. In fact, the SA has potential solutions in the multi-objective optimization field. 152 ANDOJO ONGKODJOJO AND FRANCIS E. H. TAY

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Section: Single-objective Optimizationmentioning

confidence: 99%

“…Table 2 presents a summary of the specified constraints in this paper. More details on the constraints has been reported in [2], [3].…”

Section: Constraintsmentioning

confidence: 99%

Section: Comparisons Among the Proposed Design Structuresmentioning

confidence: 99%

“…(10), and Eq. (1) from [2], [3]. They can be also used to model the piezoelectric heterogeneous bimorph (a 2-layer structure) as reported in [12], [17].…”

Section: Comparisons Among the Proposed Design Structuresmentioning

confidence: 99%

Section: Introductionmentioning

confidence: 99%

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Techniques in Global Optimal Design for MEMS & Their Applications

Ongkodjojo

Tay

Mems/Nems

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Design, modeling, and mechanical characterizations of micromachined InP-based actuator for tunable MOEMS applications

et al. 2007

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A novel InP-based microactuator, which is actuated by electrostatic means, has been proposed, designed, fabricated, and characterized for tuning applications in the 1.5 lm wavelength domains. Its structural design is based on the global optimization method. The tunable device is a big square membrane, which is supported by four identical cantilever beams. The three alternating layers Si 3 N 4 /SiO 2 as a distributed Bragg reflector (DBR) mirror, which were previously reported, have been formed on the top of the membrane. Based on the optical interferometric measurements, the proposed Fabry-Perot filter has demonstrated a maximum deflection of *321 nm with an applied voltage up to 12 V, an average sensitivity of *27 nm/V, a pull-in voltage of 12.7 V, and a release voltage of 10.7 V. It is also observed that its natural frequency is 88.4 kHz. This measured frequency implies that the tuning speed of our device is fast for optical operations within 0.01 ms. In addition, our device's mirror remains so flat with a good planarity of 0.07°, which is strictly required for the filter's optical performance. This optical performance can be achieved, when the micromachined structure has a tuning displacement up to *38 nm with a low tuning voltage up to 5 V. When compared with the finite element models (FEM), which were generated by the commercialized software, Coventor TM , our experimental results agree well in terms of the natural frequency, pull-in voltage and deflections. Thus, our tunable filter, which is based on the optimized design, enables better performances including reduced actuation voltages, large pull-in voltage, improved device reliability, and fast switching times. Our device can also quickly snap back to the original position. In addition, the undesired spring-softening effect has been reduced.

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