2023
DOI: 10.1007/s13320-023-0682-0
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Micromachined Infrared Thermopile Detector Based on a Suspended Film Structure

Abstract: The micro-electromechanical system (MEMS) infrared thermopile is the core working device of modern information detection systems such as spectrometers, gas sensors, and remote temperature sensors. We presented two different structures of MEMS infrared thermopiles based on suspended film structures. They both deposited silicon nitride over the entire surface as a passivated absorber layer in place of a separate absorber zone, and the thermocouple strip was oriented in the same direction as the temperature gradi… Show more

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