Micromachined Optical Scanner Using Acoustic Radiation Force

Sasaki, Takashi; Takahashi, Yuya; Hane, Kazuhiro

doi:10.1109/omn/sbfotoniopc58971.2023.10230923

2023 International Conference on Optical MEMS and Nanophotonics (OMN) and SBFoton International Optics and Photonics Conference 2023

DOI: 10.1109/omn/sbfotoniopc58971.2023.10230923

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Micromachined Optical Scanner Using Acoustic Radiation Force

Takashi Sasaki,

Yuya Takahashi,

Kazuhiro Hane

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Micromachined Optical Scanner Using Acoustic Radiation Force

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