Micrornechanical device for the measurement of the RMS value of high-frequency voltages

Abstract. RF voltage measurement based on electrostatic RMS voltage-to-force conversion is an alternative method in comparison to the conventional thermal power dissipation method. It is based on a mechanical force induced by an RF voltage applied to a micro-mechanical system. For a theoretically adequate resolution and high precision measurements, the necessary geometrical dimensions of the sensor require the application of micro machining. In this contribution, the dependence between electrical and geometrical properties of different sensor designs is investigated. Based on these results, problems related to practical micro-machining and solutions with respect to possible sensor realizations are discussed. The evolution of different sensor generations is shown.

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“…The first generation devices (Beissner et al, 2003) have electrodes on both glass plates as shown in Fig. 5.…”

Section: First Generationmentioning

confidence: 99%

“…In this contribution we first discuss the theoretical basis for MEMS-based RF voltage measurement, with an emphasis on the design choices. We present an overview of first (Beissner et al, 2003), second (Dittmer et al, 2007a), and third…”

Section: Introductionmentioning

confidence: 99%