Microsensors based on planar microtoroid cavities

Abstract

Planar Microtoroid cavities with ultrahigh quality factor have very strong confined function to the electromagnetic wave coupled into them due to their novel ring-like structures. Therefore, they have very good applications in high sensitivity sensors and other micro optics components. In this paper, the Planar Microtoroid cavity and its coupling system constructed together with the tapered fiber are introduced. Then, micro sensors based on the above coupling system are designed. These sensors measure environmental parameters by means of monitoring the changes in the transmission spectrum of the high finesse Planar Microtoroid cavities, obtaining fine resolution and high accuracy due to their ultrahigh quality factor (Q) performance. The sensitive mechanism and the feasibility are demonstrated through optical and mechanical software simulation. With software BeamPROP, the evident resonance and strengthened phenomenon to the electromagnetic wave coupled into the micro-cavity are shown, which have a big relation with the light frequency.The results indicate that, Planar Microtoroid cavity is very promising in designing new micro sensors.