2008 IEEE/LEOS International Conference on Optical MEMs and Nanophotonics 2008
DOI: 10.1109/omems.2008.4607827
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Microspectrometer: From ideas to product

Abstract: Spectroscopy with miniaturized systems is one of the fastest developing fields and enters now industrial applications. We will discuss near infrared sensing systems based on MEMS spectrometers starting from concepts, explain prototypes and show final product.

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