Microstructures and visible-infrared optical properties of diamond-like carbon films deposited by magnetron sputtering

Tan, Xin; Li, Jiachang; Meng, Keke; Zhai, Hang

doi:10.1016/j.diamond.2023.109724

Cited by 4 publications

(1 citation statement)

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“…When the nitrogen flow reaches 20%, the G peak width reaches its maximum and subsequently decreases with further nitrogen flow incrementation. The broadening of the G peak is attributed to the increase in sp 3 content within the films [30]. The trend in G peak width variations indicates that the introduction of a certain amount of nitrogen during DLC fabrication can enhance the sp 3 content in the films.…”

Section: Microstructure Analysismentioning

confidence: 94%

Effect of Gas Flow Rate and Ratio on Structure and Properties of Nitrogen-Doped Diamond-like Carbon Films

Ma,

Wang,

et al. 2024

Applied Sciences

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Diamond-like carbon (DLC) has attracted much attention due to its unique properties such as high chemical inertness, optical transparency, and high biocompatibility. In this study, the total gas flow rate was kept constant, while the ratio of reactive gases was varied to deposit nitrogen-doped diamond-like carbon thin films on glass substrates using radiofrequency plasma-enhanced chemical vapor deposition. The effects of the gas flow ratio on the composition, microstructure, surface morphology, and optical properties of the thin films were investigated through extended deposition times. It was found that with an increase in the nitrogen-to-methane gas flow ratio, the film surface became smoother and more compact. The maximum transmittance in the visible range reached 90%, and the highest and lowest transmittance in the same ultraviolet wavelength region differed by up to 25.62% among several sample groups. The optical bandgap decreased from 3.58 eV to 3.46 eV, contrary to the trend of the sp2 fraction variation. Compared with other studies, this study considered the preparation of nitrogen-doped diamondoids using a chemical vapor deposition method with a lesser total gas flow rate passed into it, which provides practical data reference value for the preparation of N-DLC.

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Section: Microstructure Analysismentioning

confidence: 94%