Microsystem based Energy Harvesting (EH-MEMS): Powering pervasivity of the Internet of Things (IoT) – A review with focus on mechanical vibrations

Iannacci, Jacopo

doi:10.1016/j.jksus.2017.05.019

Cited by 66 publications

(38 citation statements)

References 37 publications

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“…The IoT has the capability to improve the quality of human life by applications in transportation [3], human health [4], manufacturing maintenance [5], and education [6]. However, a practical route to powering the IoT devices remains unclear and necessitating cost effective and continuous power sources to support this form of devices [7].…”

Section: Introductionmentioning

confidence: 99%

Influence of Sputtering Parameters on Structural, Electrical and Thermoelectric Properties of Mg–Si Coatings

et al. 2018

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Mg–Si thin films (23 ≤ at.% Si ≤ 43) were deposited by co-sputtering of Mg and Si targets in an argon atmosphere. Two groups of samples were prepared with respect to sputtering parameters. The first Group I was synthesized while residual pressure in the reactor was lower than 7 × 10−4 Pa and the second Group II when reactor was pumped down to pressure higher than 7 × 10−4 Pa. The Mg2Si phase appeared for all as-deposited films of Group I around the stoichiometric composition region (29 ≤ at.% Si ≤ 37) and in the Mg-rich region (at.% Si < 29) the Mg2Si and Mg phases coexisted. An amorphous structure was obtained for all as-deposited films of Group II no matter their composition (34 ≤ at.% Si ≤ 38) and the Mg2Si structure was achieved after post annealing under air at temperature ≥140 °C. Thermal stability of Mg2Si thin films was investigated by annealing treatments under air. Superficial Mg2Si structural decomposition began at T > 500 °C and layer morphology and structure damaged while annealing temperature increased up to 700 °C. The films’ electrical resistivity, free carrier concentration and mobility as well as Seebeck coefficient were measured and thermoelectric power factors were discussed vs. composition.

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Section: Introductionmentioning

confidence: 99%

Influence of Sputtering Parameters on Structural, Electrical and Thermoelectric Properties of Mg–Si Coatings

et al. 2018

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“…The aim of µTEG research is to supply steady electricity power for those miniature electronic instruments. A comparison of the existing microgenerators and applications has been exhibited in Figure 15 (Iannacci, 2019). After the research into TEG and boom of electrical technology, µTEGs have come to be utilized in many fields, like business electronics, health electronics, and IoT (Haras and Skotnicki, 2018;Tomita et al, 2018a).…”

Section: Performance and Applicationmentioning

confidence: 99%

Si and SiGe Nanowire for Micro-Thermoelectric Generator: A Review of the Current State of the Art

et al. 2021

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In our environment, the large availability of wasted heat has motivated the search for methods to harvest heat. As a reliable way to supply energy, SiGe has been used for thermoelectric generators (TEGs) in space missions for decades. Recently, micro-thermoelectric generators (μTEG) have been shown to be a promising way to supply energy for the Internet of Things (IoT) by using daily waste heat. Combining the predominant CMOS compatibility with high electric conductivity and low thermal conductivity performance, Si nanowire and SiGe nanowire have been a candidate for μTEG. This review gives a comprehensive introduction of the Si, SiGe nanowires, and their possibility for μTEG. The basic thermoelectric principles, materials, structures, fabrication, measurements, and applications are discussed in depth.

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“…From the past two decades, major improvements in the piezoelectric material properties and manufacturing techniques have reduced the manufacturing cost [ 42 , 43 , 44 , 45 , 46 , 47 ]. The low cost and excellent properties have led to the surge in their use as materials for the internet of things (IOT) applications [ 48 , 49 ]. The above-mentioned applications involve the operation at quasi-static, infrasonic, audio, and ultrasonic frequencies [ 50 ].…”

Section: Introductionmentioning

confidence: 99%

A Review of Acoustic Impedance Matching Techniques for Piezoelectric Sensors and Transducers

Rathod

2020

Sensors

173

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The coupling of waves between the piezoelectric generators, detectors, and propagating media is challenging due to mismatch in the acoustic properties. The mismatch leads to the reverberation of waves within the transducer, heating, low signal-to-noise ratio, and signal distortion. Acoustic impedance matching increases the coupling largely. This article presents standard methods to match the acoustic impedance of the piezoelectric sensors, actuators, and transducers with the surrounding wave propagation media. Acoustic matching methods utilizing active and passive materials have been discussed. Special materials such as nanocomposites, metamaterials, and metasurfaces as emerging materials have been presented. Emphasis is placed throughout the article to differentiate the difference between electric and acoustic impedance matching and the relation between the two. Comparison of various techniques is made with the discussion on capabilities, advantages, and disadvantages. Acoustic impedance matching for specific and uncommon applications has also been covered.

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Microsystem based Energy Harvesting (EH-MEMS): Powering pervasivity of the Internet of Things (IoT) – A review with focus on mechanical vibrations

Cited by 66 publications

References 37 publications

Influence of Sputtering Parameters on Structural, Electrical and Thermoelectric Properties of Mg–Si Coatings

Influence of Sputtering Parameters on Structural, Electrical and Thermoelectric Properties of Mg–Si Coatings

Si and SiGe Nanowire for Micro-Thermoelectric Generator: A Review of the Current State of the Art

A Review of Acoustic Impedance Matching Techniques for Piezoelectric Sensors and Transducers

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