2022
DOI: 10.21203/rs.3.rs-1450694/v1
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Mid-infrared Supercontinuum-based Fourier Transform Spectroscopy for plasma analysis

Abstract: Broadband mid-infrared (MIR) spectroscopy is a well-established and valuable diagnostic technique for reactive plasmas. Plasmas are complex systems and consist of numerous (reactive) types of molecules; it is challenging to measure and control reaction specificity with a good sensitivity. Here, we demonstrate the first use of a novel MIR supercontinuum (SC) source for quantitative plasma spectroscopy. The SC source has a wide spectral coverage of 1300-2700 cm-1 (wavelength range 3.7-7.7 μm), thus enabling broa… Show more

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