Migration-Induced Ge Dot Formation

Kaechi, Shuya; Kitayama, Daisuke; Suda, Yoshiyuki

doi:10.7567/ssdm.2003.e-1-4

Extended Abstracts of the 2003 International Conference on Solid State Devices and Materials 2003

DOI: 10.7567/ssdm.2003.e-1-4

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Migration-Induced Ge Dot Formation

Shuya Kaechi¹,

Daisuke Kitayama²,

Yoshiyuki Suda³

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Migration-Induced Ge Dot Formation

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