Millimeter‐wave coplanar waveguide series stubs on BCB and low resistivity silicon

Abstract

30–225 GHz coplanar waveguide (CPW) series stubs are studied in a benzocylobutene and 10‐Ω‐cm silicon stack. Truncated side grounds improve the rejection of a 230 GHz CPW band pass filter (BPF). Silicon shielding using a grounded CPW line provides 1.79 dB insertion loss for a 215 GHz BPF. © 2014 Wiley Periodicals, Inc. Microwave Opt Technol Lett 56:375–380, 2014