Miniaturized Flexible Non‐Contact Interface Based on Heat Shrinkage Technology

Abstract

High‐performance miniaturized flexible sensors are becoming increasingly important in wearable electronics. However, miniaturization of devices often requires high‐precision manufacturing processes and equipment, which limits the commercialization of flexible sensors. Therefore, revolutionary technologies for manufacturing miniaturized flexible sensors are highly desired. In this work, a new method for manufacturing miniaturized flexible humidity sensor by utilizing heat shrinkage technology is presented. This method successfully achieves much smaller sensor and denser interdigital electrode. Utilizing this method, a miniaturized flexible humidity sensor and array are presented, fabricated by anchoring nano‐Al2O3 into carbon nano‐tube as the humidity sensitive film. This heat shrinkage technology, forming wrinkle structure on the humidity sensitive film, endows the sensor with a high sensitivity over 200% (ΔR/R0) at humidity levels ranging from 0 to 90%RH and a fast recovery time (0.5 s). The sensor allows non‐contact monitoring human respiration and alerting in case of an asthma attack and the sensor array can be adaptively attached to the wrist as a non‐contact human–machine interface to control the mechanical hand or computer. This work provides a general and effective heat shrinkage technology for the development of smaller and more efficient flexible circuits and sensor devices.