2021 Symposium on Design, Test, Integration &Amp; Packaging of MEMS and MOEMS (DTIP) 2021
DOI: 10.1109/dtip54218.2021.9568678
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Miniaturized Soft Transformable Swimmer for Evironmentally Friendly and Sustainable Fluidic Carrier

Abstract: We developed a magnetically actuated soft transformable microswimmer for an environmentally friendly and sustainable fluidic handling. They are made of the composite mixture of magnetic micro particles and soft UV curable resin. The custom developed manufacturing system allows to program the local magnetizations of each fractional areas with UV light exposure for both the bending motion by magnetic field and the surface microstructuring to minimize surface stiction. The manufacturable device scale ranges from … Show more

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Cited by 2 publications
(5 citation statements)
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“…Hence, it is imperative to enhance propulsion robustness and compatibility in both wet and dry environments. Hwang et al [94] designed a magnetically actuated soft, transformable microswimmer for environmentally friendly and sustainable fluidic handling. They are made from a composite blend of magnetic particles and soft UV-curable resin.…”
Section: Droplet Manipulation By Magnetic Flexible Substratesmentioning
confidence: 99%
“…Hence, it is imperative to enhance propulsion robustness and compatibility in both wet and dry environments. Hwang et al [94] designed a magnetically actuated soft, transformable microswimmer for environmentally friendly and sustainable fluidic handling. They are made from a composite blend of magnetic particles and soft UV-curable resin.…”
Section: Droplet Manipulation By Magnetic Flexible Substratesmentioning
confidence: 99%
“…Figure 1 shows the design and fabrication of the proposed soft microswimmer. In this work, we miniaturized the millimeter scale soft swimmers [9] to microscale by two-photon 3D nanoprinting (GT+, Nanoscribe GmbH) of PDMS and magnetic layer metallizations (Cr/Ni 10/300 nm). Photosensitive PDMS (IP-PDMS, Nanoscribe) deposited on top of a glass substrate coated with indium-tin-oxide (ITO) layer.…”
Section: Fabrication Microfabrication Of 3d Soft Microswimmersmentioning
confidence: 99%
“…Therefore, manufacturing scalability is highly demanding. In this work, we miniaturized the conventional millimetric soft swimmers [9] to micro scale soft swimmers by nanoscale 3D printing and consecutive ferromagnetic metal layer deposition by sputtering. As shown in the Figure 4, we fabricated a milli scale soft swimmer and a micro scale soft swimmer.…”
Section: Selective Motion Control Of Multiple Swimmersmentioning
confidence: 99%
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