1984
DOI: 10.1016/0379-6787(84)90112-1
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Mobility and carrier concentration in polycrystalline silicon

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Cited by 16 publications
(7 citation statements)
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“…Although N t can vary significantly depending on the grain size of the poly-Si, these numbers are on the order reported in the literature. [33][34][35][36]40,47 As expected, n eff drops more steeply as the net doping concentration approaches N t . In agreement with the resistor model described previously, n eff is roughly equal to the difference between net doping and N t .…”
Section: ■ Results and Discussionsupporting
confidence: 73%
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“…Although N t can vary significantly depending on the grain size of the poly-Si, these numbers are on the order reported in the literature. [33][34][35][36]40,47 As expected, n eff drops more steeply as the net doping concentration approaches N t . In agreement with the resistor model described previously, n eff is roughly equal to the difference between net doping and N t .…”
Section: ■ Results and Discussionsupporting
confidence: 73%
“…For a set of n- and p-type dopant concentration profiles in the isolation region, Figure b shows n eff (dashed lines) for three values of N t 2.3 × 10 17 , 9 × 10 17 , and 2.3 × 10 18 cm –3 . Although N t can vary significantly depending on the grain size of the poly-Si, these numbers are on the order reported in the literature. ,, As expected, n eff drops more steeply as the net doping concentration approaches N t . In agreement with the resistor model described previously, n eff is roughly equal to the difference between net doping and N t .…”
Section: Resultssupporting
confidence: 69%
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