1999
DOI: 10.1016/s0030-3992(99)00107-3
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Cited by 3 publications
(1 citation statement)
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“…The density of copper atoms sputtered from the cathode was measured with an absorption method [13]. In the measurement [14], two sets of identical magnetrons were placed in tandem. One was taken to be the radiation source and the other was the absorber.…”
Section: Methodsmentioning
confidence: 99%
“…The density of copper atoms sputtered from the cathode was measured with an absorption method [13]. In the measurement [14], two sets of identical magnetrons were placed in tandem. One was taken to be the radiation source and the other was the absorber.…”
Section: Methodsmentioning
confidence: 99%