2019
DOI: 10.1088/2051-672x/ab5c83
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Model-based design of areal material measures with component surfaces

Abstract: The calibration and verification of areal surface topography measuring instruments is usually performed with artificial geometries that do not correspond to a practical measuring task like gratings or step height artefacts (ISO 25178-70:2014). While these processes have a sufficient process capability to meet the requirements of many industrial measurement applications, there are more and more applications that require small tolerances, which results in the necessity of a performance verification that is more … Show more

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Cited by 4 publications
(1 citation statement)
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“…Measurement of the topography of textured surfaces has been a major area for STMP. More than 30 manuscripts have focused solely on metrological aspects of textured surfaces, proposing new measuring procedures, new protocols for improving the extraction of the main texture´s features, and parameters for more meaningful quantification of the surface textures [33, 37, 40, 75, 78, 80, 82, 83, 92, 95, 101, 102, 109, 119, 120, 167,170,172,[178][179][180][181][182][183][184][185][186][187][188][189][190][191][192][193]]. In the last decades, scatterometry has matured to be a fast, precise and accurate characterization technique [194].…”
Section: Surface Texturingmentioning
confidence: 99%
“…Measurement of the topography of textured surfaces has been a major area for STMP. More than 30 manuscripts have focused solely on metrological aspects of textured surfaces, proposing new measuring procedures, new protocols for improving the extraction of the main texture´s features, and parameters for more meaningful quantification of the surface textures [33, 37, 40, 75, 78, 80, 82, 83, 92, 95, 101, 102, 109, 119, 120, 167,170,172,[178][179][180][181][182][183][184][185][186][187][188][189][190][191][192][193]]. In the last decades, scatterometry has matured to be a fast, precise and accurate characterization technique [194].…”
Section: Surface Texturingmentioning
confidence: 99%