“…Measurement of the topography of textured surfaces has been a major area for STMP. More than 30 manuscripts have focused solely on metrological aspects of textured surfaces, proposing new measuring procedures, new protocols for improving the extraction of the main texture´s features, and parameters for more meaningful quantification of the surface textures [33, 37, 40, 75, 78, 80, 82, 83, 92, 95, 101, 102, 109, 119, 120, 167,170,172,[178][179][180][181][182][183][184][185][186][187][188][189][190][191][192][193]]. In the last decades, scatterometry has matured to be a fast, precise and accurate characterization technique [194].…”