Model-based thickness estimation of multilayer films in picosecond ultrasonics metrology with aliased echoes

Min, Jing; Chen, Xiuguo; Liu, Shiyuan; Wang, Zhongyu; Sun, Yong; Wang, Xuesong; Tang, Zirong

doi:10.1016/j.apacoust.2024.110272

Applied Acoustics

2025

DOI: 10.1016/j.apacoust.2024.110272

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Model-based thickness estimation of multilayer films in picosecond ultrasonics metrology with aliased echoes

Jing Min,

Xiuguo Chen,

Shiyuan Liu

et al.

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Model-based thickness estimation of multilayer films in picosecond ultrasonics metrology with aliased echoes

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References 29 publications

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