Modeling and Optimization of a Novel ScAlN-Based MEMS Scanning Mirror with Large Static and Dynamic Two-Axis Tilting Angles

Abstract

The piezoelectric MEMS (micro-electro-mechanical systems) scanning mirrors are in a great demand for numerous optoelectronic applications. However, the existing actuation strategies are severely limited for poor compatibility with CMOS process, non-linear control, insufficient mirror size and small angular travel. In this paper, a novel, particularly efficient ScAlN-based piezoelectric MEMS mirror with a pupil size of 10 mm is presented. The MEMS mirror consists of a reflection mirror plate, four meandering springs with mechanical rotation transformation, and eight right-angle trapezoidal actuators designed in Union Jack-shaped form. Theoretical modeling, simulations and comparative analysis have been investigated for optimizing two different device designs. For Device A with a 1 mm-length square mirror, the orthogonal and diagonal static tilting angles are ±36.2°@200 VDC and ±36.2°@180 VDC, respectively, and the dynamic tilting angles increases linearly with the driving voltage. Device B with a 10 mm-length square mirror provides the accessible tilting angles of ±36.0°@200 VDC and ±35.9°@180 VDC for horizontal and diagonal actuations, respectively. In the dynamic actuation regime, the orthogonal and diagonal tilting angles at 10 Hz are ±8.1°/Vpp and ±8.9°/Vpp, respectively. This work confirmed that the Union Jack-shaped arrangement of trapezoidal actuators is a promising option for designing powerful optical devices.

Development of Piezoelectrically Driven Quasi-Static 2D MEMS Mirrors with Extremely Large FoV for Scanning LiDARs

“…In two of our own designs, the influence of the spring system and attachment of the actuators to the die frame is investigated. One stiffer design has 9 meanders in each spring system and actuators that are attached completely to the frame, as presented in [1], whereas the second softer design has 13 meanders in each spring system and partially released actuators, as shown in [3] and Figure 1b.…”

A Review of Mechanical Fine-Pointing Actuators for Free-Space Optical Communication

“…Although the use of piezo-stack stages is common for fine beam steering mechanisms, meeting size, weight and power requirements for small satellite platforms with these actuators is challenging. For that purpose, MEMS-based piezo actuators with an integrated gimbaled mirror for beam adjustment were suggested [82][83][84][85][86][87].…”