Modeling and Structural Analysis of MEMS Shallow Arch Assuming Multimodal Initial Curvature Profiles

Abstract

The present investigation focuses on the design and mathematical modeling of a microelectromechanical (MEMS) mode-localized based sensor/actuator system. This device incorporates a sensitive clamped–clamped shallow arch microbeam with an initial curvature shaped to resemble one of the first two symmetric and asymmetric modes of free oscillations of a clamped–clamped beam. The analysis reveals that with a suitable arrangement of the initial shape of the device flexible electrode and a proper tuning of the maximum initial rise and the actuating dc load enables the transition to display certain bistable behavior. This could be a better choice to build a device with a large stroke. Furthermore, the generated data showed the occurrence of mode-veering, indicating a coupling between the concerned symmetric and asymmetric modes of vibrations, and offering the possibility for such a device to be used as a mode-localized MEMS-based sensor utilizing veering and crossing phenomena. Indeed, where a certain energy is exchanged between symmetric and asymmetric modes of a microbeam, it can be utilized to serve as a foundation for the development of a new class of highly precise resonant sensors that can capture, with a certain level of precision, any of the sensed signal amplitudes.