Modeling Investigation on Gas Backflow Performances in Screw Vacuum Pump

Abstract

Rotor structure has a great influence on the gas backflow in a screw vacuum pump. The characteristics of the gas main flow along the spiral groove of the screw rotor and the gas reverse flow along the tooth-shaped, tooth side, radial, and circumferential clearances are investigated. A new mathematical model of the pumping flow and backflow involved in a flow balance model is proposed to investigate the actions of the shearing force and pressure difference force. The calculated backflow is verified by comparing the experimental measured results. The relationships of the structural parameters of the screw rotor are established. The effects of the rotor parameters, such as pitch, diameter, and compression ratio, on backflow are revealed. The results show that the rotor diameter and compression ratio remain constant and that the influence of pitch on the backflow is slightly weak, with backflow variations of less than 3%, whereas the pitch, rotor length, and compression ratio are constant and the rotor addendum diameter is directly proportional to the backflow. The addendum diameter of rotor #4 is the largest, and its backflow is about 1.5 times larger than that of rotor #1. When the rotor radial sizes and the pitch of the suction end are constant, the compression ratio is inversely proportional to the backflow in the low-pressure region and proportional to the backflow in the high-pressure regions. Therefore, for a vacuum pump operating in low-pressure areas, the use of the compression ratio of 2.2 or higher is favorable for the reduction in backflow.