2016
DOI: 10.1109/ted.2016.2531796
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Modeling of the SiO2/SiC Interface-Trapped Charge as a Function of the Surface Potential in 4H-SiC Vertical-DMOSFET

Abstract: A new analytical description of the trapped charge\ud distribution at the semiconductor–insulator interface of 4H-SiC\ud vertical-DMOSFET has been derived as a function of the surface\ud potential into the channel. The model allows one to accurately\ud calculate the electrical characteristics of the device in both\ud subthreshold and above-threshold operations, namely, when the\ud channel works from weak accumulation to strong inversion. The\ud accuracy of the model has … Show more

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Cited by 37 publications
(12 citation statements)
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“…The gate oxide thickness is set to 30 nm and the device width is 10 cm [2,15]. The donor concentration of n-epi region which has been used in the simulation is N D =3×10 15 cm −3 [2,15,16]. In addition, figure 1 shows also the relevant resistances affecting the carrier transport and its related locations.…”
Section: Device Structure Measurements and Simulation Methodologymentioning
confidence: 99%
“…The gate oxide thickness is set to 30 nm and the device width is 10 cm [2,15]. The donor concentration of n-epi region which has been used in the simulation is N D =3×10 15 cm −3 [2,15,16]. In addition, figure 1 shows also the relevant resistances affecting the carrier transport and its related locations.…”
Section: Device Structure Measurements and Simulation Methodologymentioning
confidence: 99%
“…1. The donor concentration of p‐epi region is ND=3×1015thinmathspacecnormalm3, while the acceptor concentration (p‐type region) is given by a Gaussian profile with a maximum doping concentration of NA=5×1016thinmathspacecnormalm3 and a decay (standard deviation) of 3 μm in the x ‐direction and of 4.5 μm in the y ‐direction like in [5, 26]. The gate oxide thickness was set to 30 nm and the MOS channel length, which is defined by the distance between the edges of n + source regions and the P‐wells, is 6 μm and the device width is 10 cm [5].…”
Section: Methodsmentioning
confidence: 99%
“…The dimensions and material properties are obtained according to the published article [4]. The dimension and doping concentration of the embedded p-layer, which are not described in [4], are determined referring to [10][11][12][13]. Current flows upwards, from the bottom (drain) to top (source), in the figure.…”
Section: Tcad Simulationmentioning
confidence: 99%