2019
DOI: 10.1007/s10854-019-02343-4
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Modification of optical and mechanical properties of nitrogen doped diamond-like carbon layers

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Cited by 17 publications
(5 citation statements)
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“…As a metastable form of amorphous carbon film, diamond-like carbon (DLC) film has received continuous interest and research regarding innovations and applications in the field of tribology, due to the unique properties of the DLC films, including self-lubrication, high hardness, and excellent wear resistance [1][2][3][4][5]. At first, DLC film is considered to be a surface protection coating deposited on metal materials and ceramic surfaces exclusively.…”
Section: Introductionmentioning
confidence: 99%
“…As a metastable form of amorphous carbon film, diamond-like carbon (DLC) film has received continuous interest and research regarding innovations and applications in the field of tribology, due to the unique properties of the DLC films, including self-lubrication, high hardness, and excellent wear resistance [1][2][3][4][5]. At first, DLC film is considered to be a surface protection coating deposited on metal materials and ceramic surfaces exclusively.…”
Section: Introductionmentioning
confidence: 99%
“…For example, Champi et al 13 and Franceschini et al 28 each observed a maximum hardness of about 22 GPa in a-C:H:N films. Interestingly, recently, Zarei Moghadam et al 29 prepared nitrogen-incorporated DLC films and found a maximum hardness of about 26 GPa despite using a very low peak load of just 0.3 mN (about 13 times lower load than the present case). This suggests that the hardness of our n-C:H:N films is superior to many of previous works on carbon films.…”
Section: Resultsmentioning
confidence: 51%
“…They found the variation of bandgap value from 2.61 eV to 2.39 eV by increasing N 2 ow rate from 5 sccm to 50 sccm (Moghadam et al 2019). The mechanical properties of N-doped DLC were studied by Chen and the co-authors.…”
Section: Introductionmentioning
confidence: 96%