“…Reactive low-temperature plasmas containing hydrocarbon gases such as methane or acetylene are weakly ionized gases containing atoms, molecules, ions, electrons, and sometimes, solid particles of nanometer or micrometer size. [1][2][3][4] These plasmas are of great scientific and industrial interest because they are used in many applications. Deposition of thin films of amorphous hydrogenated carbon used for tribological materials, [5,6] passivation layers, [7] cold-field emission cathodes for flatscreen displays, [8,9] or for the deposition of other carbonbased structures such as diamond-like carbon (DLC) films, [7,10] carbon nanotubes, nanowalls, and so on [11,12] have been addressed.…”