Monitor and eliminate the circular defects in HDP–STI deposition through oxynitride/oxide composite liner

Lan, Jin Kun; Wang, Ying Lang; Liu, Chuan‐Pu; Lee, Wen-Shi; Ay, Chyung; Cheng, Yi; Chang, Shih Chieh

doi:10.1016/j.tsf.2003.09.039

Thin Solid Films

2004

DOI: 10.1016/j.tsf.2003.09.039

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Monitor and eliminate the circular defects in HDP–STI deposition through oxynitride/oxide composite liner

Jin Kun Lan¹,

Ying Lang Wang²,

Chuan‐Pu Liu³

et al.

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Monitor and eliminate the circular defects in HDP–STI deposition through oxynitride/oxide composite liner

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References 30 publications

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