Monoethylarsine as a novel replacement for arsine in the vapor deposition of GaAs

Peer Reviewed: GC/MS Analyses of Chemical Vapor Deposition Precursors

“…Compound-specific studies are extensive, but chromatographic analyses of mixtures are virtually nonexistent (8). However, there are a few notable exceptions in which mixtures have been examined directly and quite effectively with chromatography (9,10).…”