Monolithic and heterogeneous three-dimensional integration of two-dimensional materials with high-density vias

Ghosh, Subir; Zheng, Yikai; Zhang, Zhiyu; Sun, Yongwen; Schranghamer, Thomas F.; Sakib, Najam U; Oberoi, Aaryan; Chen, Chen; Redwing, Joan M.; Yang, Yang; Das, Saptarshi

doi:10.1038/s41928-024-01251-8

Nat Electron

2024

DOI: 10.1038/s41928-024-01251-8

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Monolithic and heterogeneous three-dimensional integration of two-dimensional materials with high-density vias

Subir Ghosh,

Yikai Zheng,

Zhiyu Zhang

et al.

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Monolithic 3D integration with 2D materials

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Bae

2024

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Monolithic 3D integration with 2D materials

Han,

Moon,

Bae

2024

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Monolithic and heterogeneous three-dimensional integration of two-dimensional materials with high-density vias

Cited by 2 publications

References 67 publications

Monolithic 3D integration with 2D materials

Monolithic 3D integration with 2D materials

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