Monolithic E/D-mode P-GaN/AlGaN/GaN HFETs using reactivation annealing process

Yang, Yeo-Reum; Yim, Jun-Hyeok; Kim, Hyun-Seop; Cha, Ho-Young

doi:10.1016/j.mssp.2024.108483

Materials Science in Semiconductor Processing

2024

DOI: 10.1016/j.mssp.2024.108483

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Monolithic E/D-mode P-GaN/AlGaN/GaN HFETs using reactivation annealing process

Yeo-Reum Yang,

Jun-Hyeok Yim,

Hyun-Seop Kim

et al.

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Monolithic E/D-mode P-GaN/AlGaN/GaN HFETs using reactivation annealing process

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