Monte Carlo simulation of ion implantation (3-dimensional) and defect modeling during implantation process

Li, D.; Wang, G.; Chen, Yu; Shrivastav, Gaurav P.; Oak, S.; Tasch, A.F.; Banerjee, Sanjay K.

doi:10.1109/iedm.2001.979647

International Electron Devices Meeting. Technical Digest (Cat. No.01CH37224)

DOI: 10.1109/iedm.2001.979647

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Monte Carlo simulation of ion implantation (3-dimensional) and defect modeling during implantation process

D. Li

G. Wang

Yu Chen

et al.

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Monte Carlo simulation of ion implantation (3-dimensional) and defect modeling during implantation process

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References 9 publications

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