Monte Carlo simulations: a tool to assess complex measurement systems

Harsch, Antonia; Pruß, Christof; Baer, Goran

doi:10.1117/12.2526799

Cited by 4 publications

(2 citation statements)

References 6 publications

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“…Topics addressed in previous work with respect to tiltedwave interferometry include the demonstration and investigation of the basic idea of the TWI [7,8,[13][14][15][16], the analytical calculation of the Jacobian matrices of the numerical model for the optical setup of the TWI [17], improvements to the model correction (calibration) of the interferometer [18,19], development of a new method of generating the point light sources [20], reconstructing the high-frequency components [21], investigations on the improvement of absolute form measurements [22], a method for simultaneous topography reconstruction and elimination of calibration errors [23], and the investigation of different error sources on the reconstruction result [19,[24][25][26]. Furthermore, an initial concept for the development of traceable optical form measurements based on tilted-wave interferometry was presented in [11].…”

Section: Introductionmentioning

confidence: 99%

Development of a metrological reference system for the form measurement of aspheres and freeform surfaces based on a tilted-wave interferometer

Fortmeier

Stavridis

Schulz

et al. 2022

Meas. Sci. Technol.

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Aspheres and freeform surfaces play an important role in today's optics industry. However, the measurement of such complex surfaces is still challenging even with state-of-the-art manufacturing technology, and there is an urgent need in industry for a non-contact, highly accurate reference measurement technique. To meet this demand, at PTB, a metrological reference system for the contact-free form measurement of aspheres and freeform surfaces is under development. The measurement system is based on a tilted-wave interferometer. Advances in computational capabilities have made it possible to solve the complex inverse problems associated with this measurement system and to develop sophisticated analysis procedures for reconstructing the surface under test from the measured interferogram data. In this paper, we will present the status of the tilted-wave interferometer-based measurement system at PTB, describe the analysis procedures we have designed and show initial measurement results. The benefit of the implementation presented here is that it allows insight to be gained into the performance of the measurement system and enables traceable measurements to be established with low uncertainty.

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Section: Introductionmentioning

confidence: 99%

Development of a metrological reference system for the form measurement of aspheres and freeform surfaces based on a tilted-wave interferometer

Fortmeier

Stavridis

Schulz

et al. 2022

Meas. Sci. Technol.

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“…Previous work on this topic showed, for example, that the positioning of the specimen-under-test (SUT) along the optical axis is crucial for measurement accuracy, cf. [17]. Including black-box elements in a digital twin limits the insights that can be gained about the behavior of the physical experiment.…”

Section: Introductionmentioning

confidence: 99%

Experimental Design for Virtual Experiments in Tilted-Wave Interferometry

et al. 2022

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The tilted-wave interferometer (TWI) is a recent and promising technique for optically measuring aspheres and freeform surfaces and combines an elaborate experimental setup with sophisticated data analysis algorithms. There are, however, many parameters that influence its performance, and greater knowledge about the behavior of the TWI is needed before it can be established as a measurement standard. Virtual experiments are an appropriate tool for this purpose, and in this paper we present a digital twin of the TWI that was carefully designed for such experiments. The expensive numerical calculations involved combined with the existence of multiple influencing parameters limit the number of virtual experiments that are feasible, which poses a challenge to researchers. Experimental design is a statistical technique that allows virtual experiments to be planned such as to maximize information gain. We applied experimental design to virtual TWI experiments with the goal of identifying the main sources of uncertainty. The results from this work are presented here.

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