2021
DOI: 10.17807/orbital.v13i1.1577
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Morphology and Corrosion Behavior Study of Thin TiN Films Deposited at Different Substrates by DC Magnetron Sputtering

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Cited by 6 publications
(4 citation statements)
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“…There are not many refractory materials with both metallic and plasmonic characters that are suitable for thermo-photovoltaics and solar-thermal applications and that can replace the precious metals like silver and gold [ [1] , [2] , [3] , [4] , [5] , [6] , [7] , [8] ]. There is a renewed interest in titanium nitride (TiN) as a plasmonic metamaterial [ 4 , [9] , [10] , [11] , [12] ] as a cathode material for energy storage [ [13] , [14] , [15] , [16] ] and catalysis [ [17] , [18] , [19] , [20] , [21] , [22] ]. The nanomechanical properties, surface defects and stoichiometry are crucial for the overall device functionality and reliability [ 5 , 6 , [23] , [24] , [25] , [26] , [27] ].…”
Section: Introductionmentioning
confidence: 99%
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“…There are not many refractory materials with both metallic and plasmonic characters that are suitable for thermo-photovoltaics and solar-thermal applications and that can replace the precious metals like silver and gold [ [1] , [2] , [3] , [4] , [5] , [6] , [7] , [8] ]. There is a renewed interest in titanium nitride (TiN) as a plasmonic metamaterial [ 4 , [9] , [10] , [11] , [12] ] as a cathode material for energy storage [ [13] , [14] , [15] , [16] ] and catalysis [ [17] , [18] , [19] , [20] , [21] , [22] ]. The nanomechanical properties, surface defects and stoichiometry are crucial for the overall device functionality and reliability [ 5 , 6 , [23] , [24] , [25] , [26] , [27] ].…”
Section: Introductionmentioning
confidence: 99%
“…Vacuum-based physical vapor deposition (PVD) techniques such as sputtering [ 28 , 29 ], high-power impulse magnetron sputtering [ 24 ], pulsed laser deposition [ 30 , 31 ], and cathodic vacuum arc (CVA) deposition [ 32 ] have been widely used for synthesizing the TiN thin films. However, measuring the local properties of metal-nitrides is a daunting task as the inert nature of the nitrogen molecules and the undesirable formation of oxides can lead to nanoscopic inhomogeneities in mechanical properties [ [33] , [34] , [35] ]. The nanoindentation technique can be a promising method to investigate the nanomechanical properties [ 36 ].…”
Section: Introductionmentioning
confidence: 99%
“…Films nitride as NbN (Glowacka et al , 2014), ZrN (Abdallah et al , 2013; Wang et al , 2010), TiN (Abdallah et al , 2019, 2021a) and CrN (Zalnezhad et al , 2013) have attractive tribological manners/behaviors, elevated hardness, good quality wear, good thermal stability and resistance of corrosion. Also, they can be used in higher temperature and corrosive environments.…”
Section: Introductionmentioning
confidence: 99%
“…Naturally, this mineral undergoes electrochemical reactions (also called corrosion reactions) with surrounding areas to form dynamically stable products – rust. This phenomenon is serious and very challenging in various industries (Cen et al , 2019; Rana et al , 2017; Abdallah et al , 2021a).…”
Section: Introductionmentioning
confidence: 99%