Multi-height metasurface for wavefront manipulation fabricated by direct laser writing lithography

Abstract

We introduce two types of dielectric metasurfaces, consisting of 3 × 3 regions, which manipulate wavefront by different feature heights. Both polarization-dependent and polarization-independent metasurfaces are realized for phase depth of 0 ∼ 2π at 1550 nm, with considerable average transmittance of 80.1 and 85.1 %, respectively. The phase modulation capability can be extended over a broadband range of 1460.1–1618.0 nm for optical communications, by carefully designing nanofeature sizes. Moreover, the entire metasurfaces with nanofeatures of varying heights can be fabricated in a single process by using direct laser writing with high-precision, which is beneficial for mass production and promising in developing efficient and ultracompact devices.

Advanced manufacturing of dielectric meta-devices

“…In this section, we delve into the recent advancements in LIL and LDW for dielectric metasurface fabrication. We explore the capabilities of LDW technology, encompassing laserinduced techniques [137,183,184] , laser melting or ablating [185][186][187][188] , and two-photon LDW [189][190][191][192][193][194][195][196][197] .…”

3D nanoprinting of high-numerical aperture multilevel metalenses.

“…As such, achromatic lenses, hologram generators, anti-reflection coatings, and more have already been demonstrated in different fields such as telecommunication, sensing, imaging, and biomedicine [1]. Whereas most metasurfaces are currently being fabricated by means of high-resolution photolithography, focused ion beam milling, or electron beam lithography, the technology of two-photon polymerization (2PP)-based 3D nanoprinting is found to give rise to novel nanostructure designs due to its unique direct laser writing capabilities [2]. In this work, we investigate the design and 2PP fabrication of high-numerical aperture multilevel metalenses [3].…”