Multi-layered film stack models to simulate X-ray reflectivity of TaN and Ta thin films

Nistala, Ramesh Rao; Ong, Kenny; Wang, Yun; Zhu, Xintong; Mo, Zhi Qiang

doi:10.1109/ipfa49335.2020.9260634

2020 IEEE International Symposium on the Physical and Failure Analysis of Integrated Circuits (IPFA) 2020

DOI: 10.1109/ipfa49335.2020.9260634

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Multi-layered film stack models to simulate X-ray reflectivity of TaN and Ta thin films

Ramesh Rao Nistala¹,

Kenny Ong²,

Yun Wang³

et al.

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Multi-layered film stack models to simulate X-ray reflectivity of TaN and Ta thin films

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References 4 publications

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