Multi-Physics Coupling Simulation of Picosecond Pulsed Laser Ablation of Single-Crystal Silicon

Wang, Canwen; Su, Jingyang; Lu, Siyuan; Zhu, Wenhui; Wang, Liancheng

doi:10.1109/icept63120.2024.10668543

2024 25th International Conference on Electronic Packaging Technology (ICEPT) 2024

DOI: 10.1109/icept63120.2024.10668543

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Multi-Physics Coupling Simulation of Picosecond Pulsed Laser Ablation of Single-Crystal Silicon

Canwen Wang,

Jingyang Su,

Siyuan Lu

et al.

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Multi-Physics Coupling Simulation of Picosecond Pulsed Laser Ablation of Single-Crystal Silicon

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