2007
DOI: 10.1143/jjap.46.5543
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Multi-Probe Atomic Force Microscopy Using Piezoelectric Cantilevers

Abstract: Abstrad. ? l e lacunarity is computed for randomly diluted two-dimensional lattices in terms of the chemical distance. The crossover behaviour and the question of universality are discussed.Fractal lattices are not translationally invariant and the mass distribution around each occupied site is different from site to site. The fractal dimension characterizes only the average of the mass distribution; the fluctuation around the average is characterized by the lacunarity which may be defined as the relative mean… Show more

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Cited by 23 publications
(29 citation statements)
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“…Satoh et al [14] developed a self-sensing multi-probe AFM system by integrating the piezo-resistor with cantilever. Satoh et al [14] developed a self-sensing multi-probe AFM system by integrating the piezo-resistor with cantilever.…”
Section: Introductionmentioning
confidence: 99%
See 1 more Smart Citation
“…Satoh et al [14] developed a self-sensing multi-probe AFM system by integrating the piezo-resistor with cantilever. Satoh et al [14] developed a self-sensing multi-probe AFM system by integrating the piezo-resistor with cantilever.…”
Section: Introductionmentioning
confidence: 99%
“…For years, dual-probe AFM (DP-AFM) has been developed and shown excellent performance in applications of measurement and manipulation. Satoh et al [14] developed a self-sensing multi-probe AFM system by integrating the piezo-resistor with cantilever. Mancevski et al [15] designed a dual-probes CD-AFM, the two probes of which operate as a caliper for sidewall measurement of high-aspect-ratio features.…”
Section: Introductionmentioning
confidence: 99%
“…We have developed the MP-AFM system using such self-sensing cantilevers, which allowed us not to use any complex optical elements. We chose the piezoelectric thin-film cantilever (referred to as a PZT cantilever [11]) where the cantilever deflection was measured using the piezoelectric effect on the PZT thin-film [12].…”
Section: Introductionmentioning
confidence: 99%
“…With the improvement of technology, there were some attempts to develop the dual probe AFM system, and the technology behind can be expected to provide high precision measurements and manipulations in a lot of applications. Satoh et al [10] have developed a multi-probe AFM system with a self-sensitive cantilever, which is a micro cantilever with an integrated piezoresistor serving as a deflection sensor. Intuitively, the use of the self-sensitive cantilever reduces the complexity of the setup since the optical sensing elements can be saved.…”
Section: Introductionmentioning
confidence: 99%