Multifunctional particle coating by plasma process and its application to pollution control

Abstract

Multifunctional particle coating by Plasma-Enhanced Chemical Vapor Deposition (PECVD) and its application are presented in this review.

Vacuum template synthesis of multifunctional nanotubes with tailored nanostructured walls

“…2h ) with non-appreciable pores. In previous publications, we have demonstrated that these experimental conditions lead to the formation of microporous thin films with a relative high volume of pores 38 . On the other hand, Fig.…”

“…This methodology is straightforwardly applicable to other oxides deposited by PECVD like SiO 2 , SiO x C y H z , Al 2 O 3 , Ta 2 O 5 , oxynitrides, doped oxides, etc. and even to metal (Au, Ag) layers deposited by magnetron and DC-sputtering 35 36 37 38 39 40 . As example, Video 2 in the SI shows a 3D HAADF-STEM reconstruction of an Ag-NPs@ZnO@nano-TiO 2 nanotube where silver nanoparticles (NPs) were deposited by DC sputtering in a previous step to the formation of the ZnO shell.…”

“…The quenching of the luminescence in presence of gaseous oxygen has been applied to the fabrication of a reversible oxygen photonic sensor. Thus, we have demonstrated that it is possible to easily expand the sound knowledge in the fabrication of metal oxide thin films by PECVD and other related techniques 35 36 37 38 39 40 to the formation of supported functional nanotubes with either domed or open configurations. The combination of the materials proposed herein with the deposition of metal layers opens a new route for the fabrication of single wire devices with applications in nanosensors, nanogenerators and photonics.…”

“…Both semiconducting oxides, ZnO and TiO 2 , were fabricated by PECVD in a microwave (2.45 GHz) ECR reactor with a down-stream configuration. The experimental setup for PECVD can be found elsewhere 34 38 . Diethylzinc (ZnEt2) and titanium tetraisopropoxide (TTIP) were utilized as corresponding precursors (Sigma Aldrich).…”

“…The thickness of the shell depends on the growth rate and time with rates highly competitive in comparison with other established techniques such ALD. As a matter of the fact, we have developed 3D nanotubes with walls presenting microporous (nano-TiO 2 ), columnar mesoporous (meso-TiO 2 ) and wurzite ZnO characteristics and the multishell formed by sequential formation of these materials but the protocol is easily extendable to other metal and metal oxides deposited by PECVD, DC or magnetron sputtering 35 36 37 38 39 40 . Substrate: Main protocols involved in the template formation of the 3D nanotubes are fully compatible with the use of silicon, optical substrates, metal oxide thin films, metal nanoparticles, and flexible substrates as PDMS, PET, etc.…”