Multilayer Devices Comprised of Piezoceramic Thin Films on Dielectric Substrates

lato, Arthur Bal

doi:10.1002/9781118408186.ch24

Cited by 2 publications

(5 citation statements)

References 16 publications

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“…Direction D is located at the centroid of the primitive region. 574 See Appendix E for additional information. Table 2 provides coordinates and direction cosines (α j ), with respect to the crystal axes, for these seven directions.…”

Section: Geometry Of Cubic Crystalsmentioning

confidence: 99%

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Acoustic properties of piezoelectric cubic crystals

Ballato

2023

Int J Ceramic Engine & Sci

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This paper is offered as a complementary adjunct to the many treatments of the electronic and photonic properties of cubic III–V and II–VI compounds appearing in the literature. These crystals typically exhibit piezoelectricity, due to the molecular dissymmetry, thereby allowing the inclusion of classical mechanical/acoustic features along with the quantum. We discuss the history of this modality and then illustrate its use by applying it to an electro‐elastic problem that has the estimable virtues of having an exact solution, along with wide practical applicability: determination of the piezocoupling values governing the excitation of thickness vibrations in thin cubic films or plates of arbitrary crystallographic orientation by electric fields directed either along, or lateral to, the thickness. Explicit results are given for orientations along the great‐circle paths connecting the principal directions [100], [110], and [111]. The formalism is then applied to GaAs as an example; it is further demonstrated that various results, such as the orientational variations of piezocoupling factors, are generally applicable to other members of the III–V and II–VI families by scaling. Ancillary aspects, such as errors due to misorientations, nonlinearities, and equivalent circuit representations, are described and discussed. This work is dedicated to Gerald W. Farnell (1925–2015), Prof. Emeritus, McGill University, Montréal, Canada.

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Section: Geometry Of Cubic Crystalsmentioning

confidence: 99%

“…Directions A–C are located at the centers of Paths I–III, respectively. Direction D is located at the centroid of the primitive region 574 . See Appendix E for additional information.…”

Section: Application To Cubicsmentioning

confidence: 99%

Acoustic properties of piezoelectric cubic crystals

Ballato

2023

Int J Ceramic Engine & Sci

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“…References [1] and [14]- [16] contain numerical values for candidate materials; their Van Dyke matrices are found in [11]. Point groups 6mm and 4mm share the same matrices, except that in 4mm the stiffness c 12 is independent.…”

Section: Materials Propertiesmentioning

confidence: 99%

“…Example: f spec ~ 2.100 GHz and M = 24. Then the composite will experience resonances approximately every f c (1) = f spec /M = 2100/24 = 87.5 ~ 88 MHz (this will be modified somewhat by the Z ratio). Choosing P = 3 yields f p = f spec /P = 2100/3 = 700 MHz (in the simulations f p ~ 723.75 MHz, because t p was chosen for convenience to be 1 µm).…”

Section: 1ghz Resonator Examplementioning

confidence: 99%

“…Choosing P = 3 yields f p = f spec /P = 2100/3 = 700 MHz (in the simulations f p ~ 723.75 MHz, because t p was chosen for convenience to be 1 µm). Finally, f s (1) = f spec /N = 2100/21 = 100 MHz. Because the substrate is stress-free at its lower boundary plane, this condition will be reflected at the film-substrate interface at 100 MHz intervals.…”

Section: 1ghz Resonator Examplementioning

confidence: 99%

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Thin-film composite resonators on crystalline substrates

Ballato¹

IEEE Ultrasonics Symposium, 2005.

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Telecommunications systems depend on high stability frequency sources. For mobile uses such as cell phones, size and cost are severe additional constraints. We describe a class of composite piezoresonators that are comprised of piezoelectric thin films deposited on crystalline plate substrates [1] oriented to obtain very low temperature coefficients of frequency (TCFs) for the composite structure. Specifically described are highfrequency bulk acoustic wave resonators (HBARs) comprised of piezoelectric thin films on AT-and BT-cut quartz substrates. An example design for a 2.1 GHz composite resonator is provided. I.

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Multilayer Devices Comprised of Piezoceramic Thin Films on Dielectric Substrates

Cited by 2 publications

References 16 publications

Acoustic properties of piezoelectric cubic crystals

Acoustic properties of piezoelectric cubic crystals

Thin-film composite resonators on crystalline substrates

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