Multilayer thin-film resistive structures with temperature self-compensation for super-precision resistors and strain gauges

Abstract

The paper presents the main structural and topological solutions, the technology of obtaining and stabilizing multilayer thin-film resistive and tensoresistive structures with temperature self-compensation, which allows achieving a TCR value of no more than ± 1 × 10−6 and an instability of resistance no more than ± (0.01 … 0.02) %.