Multimolecular interactions for SiC N O  film formation by parallel plate plasma-enhanced chemical vapor deposition without heat assistance

Kawakami, Hiroki; Hori, Kenta; Watanabe, T.; Habuka, Hitoshi

doi:10.1016/j.matchemphys.2022.126970

Materials Chemistry and Physics

2023

DOI: 10.1016/j.matchemphys.2022.126970

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Multimolecular interactions for SiC N O film formation by parallel plate plasma-enhanced chemical vapor deposition without heat assistance

Hiroki Kawakami

Kenta Hori

T. Watanabe

et al.

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Gas Phase and Surface Processes of Sic X N Y O Z Film Formation by Parallel Plate Plasma-Enhanced Chemical Vapor Deposition Without Heat Assistance

Habuka

2024

Preprint

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Gas Phase and Surface Processes of Sic X N Y O Z Film Formation by Parallel Plate Plasma-Enhanced Chemical Vapor Deposition Without Heat Assistance

Habuka

2024

Preprint

View full text Add to dashboard Cite

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Multimolecular interactions for SiC N O film formation by parallel plate plasma-enhanced chemical vapor deposition without heat assistance

Cited by 1 publication

References 10 publications

Gas Phase and Surface Processes of Sic X N Y O Z Film Formation by Parallel Plate Plasma-Enhanced Chemical Vapor Deposition Without Heat Assistance

Gas Phase and Surface Processes of Sic X N Y O Z Film Formation by Parallel Plate Plasma-Enhanced Chemical Vapor Deposition Without Heat Assistance

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