Multiple-surface interferometry of highly reflective wafer by wavelength tuning

Kim, Yangjin; Hibino, Kenichi; Hanayama, Ryohei; Sugita, Naohiko; Mitsuishi, Mamoru

doi:10.1364/oe.22.021145

Cited by 61 publications

(28 citation statements)

References 30 publications

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“…2 we show linear (in blue) and nonlinear (in red) phase-shifted fringes. As we prove in the next sections, the nonlinear phase-shifting ( ) t  generate a spuriousnumerical piston when a linear-reference PSA is used as phase-demodulator [4][5][6][7][8][9]. Fig.2 shows an example of linear and nonlinear carrier fringes,…”

Section: Linear and Nonlinear Phase-shifted Interferometric Fringesmentioning

confidence: 81%

“…As we show next, using a linear-reference PSA, we generally obtain a spurious-piston, 0 Piston  [4-9]. Hibino et al, have proposed linear-reference PSAs to eliminate this spurious piston [4][5][6][7][8][9]. Here we are proposing an alternative solution, a more natural way (we believe), for disappearing this non-desired, spurious-piston.…”

Section: Linear-reference Psa For Demodulating Nonlinear-carrier Fringesmentioning

confidence: 89%

“…Hibino et al indicated that an artifact spurious piston appears in the estimated phase when using a linear-reference PSA to demodulate nonlinear phase-shifted fringes [4][5][6][7][8][9]. This spurious-piston is a numeric artifact of the linearreference PSA, which may be wrongly interpreted as physical optical thickness [4][5][6][7][8][9]. Real optical thickness measuring, is fundamental when testing optical material slabs in semiconductor and display equipment [4][5][6][7][8][9].…”

Section: Introductionmentioning

confidence: 99%

“…This error is given by the product of the demodulated-phase and the synthetic wavelength, which is much greater than the wavelength used [9]. Linear-reference PSAs for demodulating wideband, nonlinearcarrier fringes, have been developed using the Taylor series expansion of the arc-tangent of the phase-error [4][5][6][7][8][9]. The linear-reference PSA's coefficients are then calculated to set the first terms of this Taylor expansion to zero [4][5][6][7][8][9].…”

Section: Introductionmentioning

confidence: 99%

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Phase-stepping algorithms for synchronous demodulation of nonlinear phase-shifted fringes

et al. 2019

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Standard phase-stepping algorithms (PSAs) estimate the measuring phase of linearcarrier temporal-fringes with respect to a linear-reference. Linear-carrier fringes are normally obtained using feedback, closed-loop, optical phase-shifting devices. On the other hand, open-loop, phase-shifting devices, usually give fringe patterns with nonlinear phase-shifts. The Fourier spectrum of linear-carrier fringes is composed by Dirac deltas only. In contrast, nonlinear phase-shifted fringes are wideband, spread-spectrum signals. It is well known that using linear-phase reference PSA to demodulate nonlinear phase-shifted fringes, one obtains an spurious-piston. The problem with this spurious-piston, is that it may wrongly be taken as a real optical thickness. Here we mathematically find the origin of this spurious-piston and design nonlinear phase-stepping PSAs to cope with open-loop, nonlinear phase-shifted interferometric fringes. We give a general theory to tailor nonlinear phase-stepping PSAs to demodulate nonlinear phase-shifted wideband fringes.

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Section: Linear and Nonlinear Phase-shifted Interferometric Fringesmentioning

confidence: 81%

Section: Linear-reference Psa For Demodulating Nonlinear-carrier Fringesmentioning

confidence: 89%

Section: Introductionmentioning

confidence: 99%

Section: Introductionmentioning

confidence: 99%

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Phase-stepping algorithms for synchronous demodulation of nonlinear phase-shifted fringes

et al. 2019

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“…where Jx is the Fourier transform of intensity I, and wx is the window function comprising polynomials [13]. In Eq.…”

mentioning

confidence: 99%

Measurement of absolute optical thickness of mask glass by wavelength-tuning Fourier analysis

Kim¹,

Hbino²,

Sugita³

et al. 2015

Opt. Lett.

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Optical thickness is a fundamental characteristic of an optical component. A measurement method combining discrete Fourier-transform (DFT) analysis and a phase-shifting technique gives an appropriate value for the absolute optical thickness of a transparent plate. However, there is a systematic error caused by the nonlinearity of the phase-shifting technique. In this research the absolute optical-thickness distribution of mask blank glass was measured using DFT and wavelength-tuning Fizeau interferometry without using sensitive phase-shifting techniques. The error occurring during the DFT analysis was compensated for by using the unwrapping correlation. The experimental results indicated that the absolute optical thickness of mask glass was measured with an accuracy of 5 nm.

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Past Achievements and Future Challenges in the Development of Infrared Antireflective and Protective Coatings

Guo

Yang

Dai

et al. 2020

Physica Status Solidi (a)

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Infrared (IR) antireflective and protective coating (ARPC) is crucial for the development of IR precision guidance and detection systems for practical applications, attracting significant attention from strong military powers worldwide. Extreme application environments require functional film to have high surface hardness, excellent stability, and good adhesion. Further, multispectral optical transmission demands extremely low absorption in the visible and far‐IR bands, adjustability of optical performance parameters, and optical antireflection in particular bands, and radar stealth requires a relatively low resistance. Herein, recent experimental progress on IR ARPC is reviewed and future opportunities are discussed. Based on the application environment and window substrate, various ARPC material systems, including diamond‐like C, Ge carbide, B phosphide, and oxides, have been developed. These systems are capable of fulfilling different application demands and demonstrate exciting application prospects. To promote the development of IR ARPC material technology, the basic characteristics, fabrication techniques, microscale structures, optical properties, mechanical properties, and development and applications of typical IR ARPC materials from a comprehensive and systematic perspective are presented.

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Multiple-surface interferometry of highly reflective wafer by wavelength tuning

Cited by 61 publications

References 30 publications

Phase-stepping algorithms for synchronous demodulation of nonlinear phase-shifted fringes

Phase-stepping algorithms for synchronous demodulation of nonlinear phase-shifted fringes

Measurement of absolute optical thickness of mask glass by wavelength-tuning Fourier analysis

Past Achievements and Future Challenges in the Development of Infrared Antireflective and Protective Coatings

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