Multiresonant layered plasmonic films

Abstract

Abstract. Multiresonant nanoplasmonic films have numerous applications in areas such as nonlinear optics and sensing and as spectral tags. Although techniques such as focused ion beam milling and electron beam lithography can produce high-quality multiresonant films, these techniques are expensive, serial processes that are difficult to scale at the manufacturing level. Here, we present the fabrication of multiresonant nanoplasmonic films using a layered stacking technique. Periodically spaced gold nanocup substrates were fabricated using selfassembled polystyrene nanospheres followed by oxygen plasma etching and metal deposition via magnetron sputter coating. By adjusting etch parameters and initial nanosphere size, it was possible to achieve an optical response ranging from the visible to the near-infrared. Singly resonant, flexible films were first made by performing peel-off using an adhesive-coated polyolefin film. Through stacking layers of the nanofilm, we demonstrate fabrication of multiresonant films at a fraction of the cost and effort compared with top-down lithographic techniques. © The Authors. Published by SPIE under a Creative Commons Attribution 3.0 Unported License. Distribution or reproduction of this work in whole or in part requires full attribution of the original publication, including its DOI.